Vacuum membrane pump and a head portion for a vacuum membrane pump

US patent number: 5876190
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Patent issued 03/02/1999
Inventor(s): Spring, Arthur
Assignee Buchi Labortechnik AG (Flawil, CH )
Application No. 08/759,460 filed on 12/05/1996
Current US Class 417/413.1, 417/454, 417/DIG.1, 92/164
Field of search 417/413.1, 417/571, 417/DIG.1, 417/454, 92/164
International Classes: F04B 45/04 (20060101), F04B 45/00 (20060101), F04B 53/00 (20060101), F04B 017/00 ()
Examiners
Primary Charles G. Freay
Attorney, agent or firm: Shoemaker and Mattare, LTD
US patent references 5676531, 2859912, 3947156, 4516479, 5002471, 5033940, 5171132, 5219278, 5275541, 5540568